Faites connaître cette offre !
Reference : UMR5129-MARCLO-007
Workplace : GRENOBLE
Date of publication : Thursday, July 11, 2019
Type of Contract : FTC Scientist
Contract Period : 12 months
Expected date of employment : 1 October 2019
Proportion of work : Full time
Remuneration : between 2617.05 € et 3017.31 € gross per month
Desired level of education : PhD
Experience required : Indifferent
This job offer is part of the European MadeIn4 project in which the LTM and LETI are involved, in particular, in aspects of dimensional metrology at the nanoscale. In the field of nanotechnology, the reduction of the dimension of the patterns as well as the increase of their geometrical complexity makes the step of dimensional metrology critical. Conventional techniques such as SEM, AFM or scatterometry, although performing well on some aspects, display their limits to deliver robust results. The subject proposed here is positioned in a hybridization approach of metrology techniques to improve this robustness. This hybridization will mainly take into consideration the contribution of a new technique: the CDSAXS. This metrology using X-rays and previously only available on synchrotron lines, is becoming democratized with the development of "table" equipment. The samples on which the measurements will be made will be provided by ST Microelectronics and will correspond to reference standards. In addition to the dimensional parameters, such as the height, the width or the slope of the edges, the roughness on the sides of patterns can also be taken into account in order to have a more complete approach. Hybridization of techniques will be done through the development of machine learning tools
The candidate will have an activity covering several aspects related to metrology. The experimental part will take a large part of the work to measure the samples through the different tools mentioned above. Considering the difficulty of carrying out a significant quantity of measurements (in terms of time and availability of equipment), a modeling part will also be implemented in order to reconstruct by simulation and for the different techniques, the expected signatures. These simulated results will be the basis of learning for the machine learning tools that will also be implemented for the stated problem.
Previous work has already made progress on some parts and the work presented here will benefit from these advances.
The required skills are at the experimental level of dimensional metrology techniques. A good knowledge of some of them is important. The candidate must also show a strong interest for software development, for the modeling part but especially for the development of machine learning tools and the use of associated open source libraries.
In addition, since the project is part of a collaboration between 2 laboratories, the candidate will have to show a pro activity, an autonomy, a positive attitude and a will of scientific exchange.
The proposed work is part of a close collaboration between the LTM / CNRS / UGA and the LETI / DPFT / SMCP / LPMS.
The LTM is a joint research unit CNRS / Université Grenoble Alpes, with 4 research teams and about 90 people. The laboratory is located on the CEA-LETI site in Grenoble. The candidate will be recruited in the Metrology & Modeling group of the Advanced Lithography team.
LETI is an institute of the CEA and is a major player in the development of micro and nanotechnologies in the world. The LPMS is one of the 3 laboratories of the SMCP, Service of Metrology and Physical Characterization, which gathers nearly 120 people. It is part of the Minatec Nanocharacterization Platform, which is one of the largest in Europe.
Constraints and risks
We talk about it on Twitter!