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Reference : UMR5270-ANNTUR-002
Workplace : VILLEURBANNE
Date of publication : Friday, October 25, 2019
Scientific Responsible name : ABDELKADER SOUIFI
Type of Contract : PhD Student contract / Thesis offer
Contract Period : 36 months
Start date of the thesis : 1 January 2020
Proportion of work : Full time
Remuneration : 2 135,00 € gross monthly
Description of the thesis topic
The PhD project is in the frame of the Nano2022 program between STMicroelectronics and INL laboratory.
The objective is to develop integrated gas sensor exploiting STM FDSOI 28 nm technology platform. Sensing layers will be integrated in the CMOS back end of line (BEOL). Proposed integrated gas sensors are disruptive in nature, beyond CMOS technology and enable on a long term the realization of ultra-Low Power electronic noses.
The operating temperature is the technological challenge to be studied at the beginning of the PhD project. The energy consumption of conventional gas sensors is related to the heating system for measurements and regeneration of the sensor. For example, carbon oxide detection using SnO2 layers operates typically between 250°C and 400°C.
The project will focus on to COx, NOx or CO2 sensing and will start with an advanced research at material level. The objective is to study materials which reacts selectively to COx, NOx or CO2 at room temperature. The selected materials will be integrated on CMOS-FDSOI technology using a capacitive dividing bridge to amplify sensitivity. The process integration has been already developed in a previous work . The electrochemical gas sensors will be finally electrically characterized under various ambient to study different parameters: operation temperature, limit of detection (LOD), selectivity, reversibility and response time.
The PhD will be mainly developed between Institut des Nanotechnologies de Lyon (INL) and Laboratoire des Technologies de la Microélectronique (LTM) in Grenoble . Sensing materials will be developed at INL, while sensors integration on CMOS FD-SOI will be performed at LTM. Characterizations under various gas ambient will be performed at Institut Matériaux Microélectronique Nanosciences de Provence (IM2NP) in Marseille thanks to the collaboration with “Microsensors and Instrumentation” team.
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